Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at >3.5 GHz
نویسندگان
چکیده
منابع مشابه
Electromechanical resonators from graphene sheets.
Nanoelectromechanical systems were fabricated from single- and multilayer graphene sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide. Vibrations with fundamental resonant frequencies in the megahertz range are actuated either optically or electrically and detected optically by interferometry. We demonstrate room-temperature charge sensitivities down to ...
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ژورنال
عنوان ژورنال: IEEE Transactions on Microwave Theory and Techniques
سال: 2021
ISSN: 0018-9480,1557-9670
DOI: 10.1109/tmtt.2021.3079497